Файл: Том 1.pdf

/. . 3 , .; . %.!. , . . ., . (!"# «$%"»)

A-SI:H

$> A "$& ## ! A& # " # $? % & / (K <) C $& # " a-Si:H $% &, $8#8 #% / A!! # " # %- #8>8 8 " 8 $? % & / A C #$ & " >" #/ " "&- ?>, $ " #@ " 8 #" & " #8# K <. ?H " " 8, C # A& 8 A C #$ # ?>" , # $"">, >$& @ , " #% > [1]. ‚ &* ? > % &@ & "* A "$ - #8 &* / $ %8 / C ## K < " a-Si:H.

"$#8 ?>& $#% A$. $8 A$ ?> >- $& > #%8 # 8 > # " > ' , #"$&*% > ?> $& > " > #" # # " > K <. < "& C , " * ?- % ?>& >" & $ " " " = # . < # A 8 " * ?- % ?>& $8 = $% >/ ? # " & #"& # , # A "$#8 &* > ? % >. 8 A$ A "- $#8 ?> $ #%8 > 8 > # " > ' , #"$&*% > $ ?> $& > " > #" # # K <. "$ -

#8 ?>& $ #& # 8 " .

#". 1 $# #% C#- " C 88, $& > $"& ?- ? # #%8 > ' K < — C#" C 88 "# &* C #%8- # $# & " C % $# #"$> #/, 8#-&* % #$# & " C . - % &* % $.

< % , C % 8> # " # " " 8 8

# % #"# ?& # K < " " >8 " 8. $# & " C #8 #@ #@, $# " = ##

$# & " C , # #% #". 1, # " . <# 8 = " * K < #8 #@ " # #@, , " = # 8$& # &* " # * $"". /-? ## #%8 ## - A!!# # %$& # , $"& &* C # E # @= C "$# &- #/ 8 / ? > ? .

0 +

1. Jeffrey Y., Subhendu G. Metastability of Amorphous Silicon // PV Module Reliability Workshop. Golden, CO. February 19. 2010.

244

$.+. -, .; . 2.2. $, . .-. ., . (!"# «$%"»)

!P+-N-

' 8 = > >" &* > " " @ " * $* A C## " " & @ $# $= 8 " " ##, > " 8 $ - & @ " # # @=#8# " /" 8# p-n-$ " . < A 8 > " # $&* / # # @= / "$" ? " # p+-n-$, $ - & 8 / # 8 / > !#%# " # A!! , $% > " # * & C #% A # A!! # $& # * $#8 &* @ " A8# C "& , "$" ? @ % * $&* %8 @ #- # @= @ "$" ? " * $.

‚ &*@ " = / ? >, & " $#" $/ " # # ">- = # A8# , $% & $>"# * # #@ p+-n-$. $# # & E / 8 & ## "# & 8# % ? % C n-"& #, "& " # A C , " # #@ $* A C## ?& " # ? &*E# $&- " / . ' 8 & ""# " C $, $& C & 8 [1], ?>& $ % # # @= / "$" ? " # % C $ " 8 $& / "$" # / > A!! , $& @=# $ - " "# & / % A8# 8 "& . < >/ " $% & $% *, A!! # " * # ## p+-n-$ & " 8- / ! # / & C# # A8# C "& . < "& &*- >/ "$" # !#%# " # A!! >" C # ## $% & $ * # " #/ $&, C 8 8 *- E# * # ">= # % C 8 # C p+-n-$.

" % &* # " # #""& #/ ?>& % ? $ $#8#% ## # # @= / "$" ? " # #!! %# > $ - . " * $& C $ ?>& $ " $8 =*@ " , $> " $8 =*@ $C 88> « DD ' » [2].

0 +

1.Herlet A. The forward characteristics of silicon power rectifiers at high current densities. Solid State Electronics, v. 11, p. 717-742, (1968).

2.Mnatsakanov T.T., Rostovtsev I.L., Philatov N.I. Investigation of the effect of nonlinear physical phenomena on charge carrier transport in semiconductor devices. 1987 Solid-State Electron . 30. M 6. . 579.

245

. . 3 , . . , '; . ?. . / , . . ., . (# 2#, 7. # 4 )

IGBT

O#$& >/ %#" " #% >8 % 8 IGBT — "#- &* >/ #$ &@ > $&$# > $#? , $# E# "$8>E& 8 $#% " " " # > 80- C .

D ?" > E 8> $&$# > $#? " # ! 8 #@ ? # #" # , " " @ " # E- 8 IGBT [1].

& #%8 # " ?" C E 8 IGBT ?>& % ? # #%C- & " , " " 8 / #% ? #". 1.

2- 37

. 1. + + ?$ + ! -$ $ # /+$

" $% & #%8 # * "$&* @ $& " * #% "- C E 8 IGBT #$% " 20 — 100 8 8# # #$" " / # $# && #"$> 8 C $#? 0— 1 # $## && — A8# 50 — 100 ' [2].

& E 8 =#/ "# &* >$& $ & # / " 8 , $% & $ " #%# * C E 8>. # >8# A& 8 8# "#- & >? > $# > "# #$ 27, ?& @=# #% #8 8 " ?" C E 8 $& " 20 — 120 [3].

" $% & #%8 # * "& ?> "#C & - 8 8 1 8 ', $A 8 ? #8 = &* " #"* A #

# % % 8& #@ " " > " /.

0 +

1..0. ""& # # #"$> # $&$# > $#? / '. . , •. . K . — .: '>"E. E ., 1975. — 325 ".

2.! . . %8 # E 8 > $8 $&$# > #% / / . . & , .‹. D8# , . . ! # // %8 # &* # . 2006. — M 12. — D. 46—49.

3.F+! . . " ? " # " E 8 > $8 " 8 > ?#$ - & > %#" / . . & // > # " " % E @= C & " 8$ : "?. . . — &* " : &< , 1987. — D. 38 — 43.

246

$. . , .; . . . , . (!"# «$%"»)

"# > #""& &*" # ? > ?& " # ! A& # " # $? % & / " & / A C## # 8 #% ## # $#% " $# " % #@ # C # > $#% " > 8 = " /, - > 8 / !# 8> "$" ? > $#% # * C " & > $ 8 = " *@ 2 ' C $# % ##, $>E @= / 2 $/' " / 8 = " #, < 15 % # C #/ 8 " $ - 20 & . <-# #8 8 , &* /E $# # ?& " # A!!- # " # ! A& # " C $? % # " & / A C## " %" $#" 8 > 8 # & , # " " % # 8 > " #/ # & C#/ ? % 8 C " > " & > A& 8 .

'/ ? ""8 ? &*E / & "" #% " > $&$#- > " # #/ " # % # %8 " # # $#8 # 8 > " & > A& 8 . ""8 & C# # #%C & # # " 8 " #8 " * " # % # $#8 # " > A& 8 .

" % " /" &* > 8 # & , $? $ & 8 > A& 8 , # & #

$" > A C # " # # C 88> C$ # >$& > $ - # &* > # A!! # " # ( #". 1 $% #% " # > % #"#8 " /). ""8 %8 & C# # 8 "" C $#% " .

'? ""8 > >

247

. . , .; . !. . $3 , . .-. ., . (!"# «$%"»)

CdS·O ZnSe·O

" > 8 > $& # " # #/ 2'6, E# #"$&*% 8>$A& # , ? "$# @ $#" " # # #"& . < # A 8 * & C# # # #"& 8 ?> $ 1 8 &% (~1020 "8 –3). < # # / #8$& ## %8 # * " # %>.

8# $ & C# # #"& 8 8 8 # / #8$&- ## 8 #" & ZnSe 2¾1020 "8–3 # CdS 4¾1020 "8–3. ' " $& #"$&*% "* 8 #" &&> " #" >8 " # 8 #"- & ~1019"8–3, " % >8 #$8 ! " # # & # 8 " #- 8 ##. % > "$> #-& C# > "& $ 8 # , ? "$# @= / $& # # ! 8 ## #% ?H 8 .

' " " ## " # / #$" @=# " % (' D) #"& ,#% A& >/ $ "& # % > $#8 " # # " # 8 ## $#8 "# % 8 *E E# # %$ - = / % >. $% , #%8 # 8 &* #% #" &- & CdS·O # ZnSe·O $# ## #"& % .

% " # % > # C 88 #" && ZnSe·O # CdS·O "& " = " % # $& # ^0 % $#8 " # $ - E #@ ^D: 0,11 # 0,25 A' " " . "" # 8 H- # L-8$8# SA " # ZnSe·O # CdS·O, $# / # / [OS] = 2·1020 "8–3 " " # ~310 # 430 8A', $# & C# # #""& 8> ? % — 310 # 610 8A'. ' % &* & CdS·O # ZnSe·O %$& # $% > ^+ % , # $&- # +-8$> SA " # $# ? &*E# [OS] 8 & .

& ZnSe·O "& " # 8 & C % % 8 H # L $& "> 8 C $ - > *" . ' "$ 8# &@8# " ## ( ) # 8 $ - * +-$& " . < # A 8 " #C " % E # 8$ SA "- # . C# " C #-& C# C "& ZnSe·O 8 " 8$ SA " # % # $& " ~ 480 8, &- @= " " 88 / $# & ## +- # L-8$. < & " 480 8 # -8 & "* ZnSe·O, ?>& # #!# # .

""& # A "# > "$ $% & , #8 " % # 8 [ ], C # / #8$& # /, # > & / $ "$8 . ' CdS·O $"& % # , ZnSe·O — % >E . " % #- # A "$#8 &* $& / [OS] " # &*" 8, "* #"& # %&> E # CdS # " # 8 & *" # SO2 [2], % >E # , " " C , " % " %8 " *@ ? %- # "# $" # ZnSe # CdS.

248

.". 0 3 , .; . . . -, . . ., . (!"# $"%2, 7. 7 )

GE-SB-TE-IN

&* C # > " & ? % > $&$# # "& C " " , " " #, Ge2Sb2Te5 (GST225), # "# #""& @ " $"& - 8 , " % " # "$E >8 $#8 # 8 " /" A C % #- "#8 / ! % / $8 # (PCM). < # #$ ? > > " /" "#%8 # $# " # # A& !#%# " # " /" 8 # & $# ? #8 8 ! % 8 $ 8 ! ¿ #" & " " " # "& " # $# " C % /" # CD, DVD # Blue-ray #" # A& # " C % /" # PRAM. ' " %# " A #8, &*@ / ?- > & & "* #""& # # C # $" # A& #- " C $& A&$" * # $& "#" 8> Ge-Sb-Te-In.

< # $8 =# A& / " 8> " ?& $& #$# 8 NI6008 # $# 8$8 KEITHLEY 6486 ?> #%8 > ' # $" > 8$> % #"#8 " # &* C "$# & # $& > ? % # $& Ge2Sb2Te5, 8 #!# # C %- / # / In (0, 0,5, 1 # 3 8 "".%). &=# > $& " " &- 60—80 8 # "* 8-"#& 8 8# "$.

""& # # $& "#" 8> Ge-Sb-Te-In > #& , :

-# In $# # % # &* 8 #@ 8$> !- % C $ #% 8 ! C " " # #" & " (140 — 160 D $# 3 8 "".% In) $ " #@ " #" >8 GST225 (132 — 142 D), #@ &* C "$# & # 8 ! 8 " " ## $;

-" # 8 ## In GST225 % # A C## #-

## (Ea) $#8 " # 8 ! 8 " " ## % " " 0,28 (GST225)0,31 A' (GST225+3 8 "".% In), $# A 8 & #" & " C " "- # Ea " " $# " # #%8 / # " " & ~0,1 A';

- # $" # $#& C A& # " C $& $#- # / 8 8 *E #@ A C# # ## $#8 " # 8 ! 8 " " ##, 8 ?> * " % " A!! 8 < &- K & , 8 *E @=#8 >" $# &* C ? * & $#8- " # $ & % >8 " " # 8.

' # 8 #!# # @= / ? # In $% & " = " "E#- # * #$% #" # 8 # & GST225, 8 ?> * #"$&*- % & $>E # " # ? > PCM " /" .

? >$& $# $ # #" " ? % # # # ""#/" / K ## (M 16.552.11.7086), KK (11-03-00269) # KD < D ($ M 169867).

249

". . $= , . . '; . .$. 4 , . . ., . (!"# «$%"»)

,

D " # " & #%8 # "$# & # $&$ - # > C % > " " , $8 = > $ C % ( #". 1). ' ?- / 8 " # 8 C %8 = *" 8 12 " " " % >8# # # 8#. %8 = # " " $ C % , # $8 = # # % " C % 8 $% & :

) & E "& # * # 8# $"" " ? ## # " ? ## C % ;

?) #% # * #@ " " " 8 &> ## #- 8 C C % ( # > $ ppb);

) #= * 8 , $ #= >8 % 8.

8 # " * $/ "#" 8> $% & #" &@ # * # " " > $#8 " /, " =# " 8 8 % .

& $# # $/ "#" 8> #"$&*% " C #" C %-« L' 1.2» « << < », ? "$# @=#/ > @ #@ C& ? & 0,1 ppm # > $? & 10 ppm. & " % # $/ "8 "# C % #"$&*% " C-C % < — 102 K < « < O ». & C # " " # #"$# C #"$&*% " « »

" > % #, E 8> ? >: $& # $# &* > " # &* " / " " " % >8# # # 8#, #""& # #- 8# # $"" " ? ## # " ? ## C % , $#" " " , &- 8> " >8# #""& 8>8# C % 8# ($> "$# , , ? % & ).

. 1. (!-?$ +

250

.$. , .; +. . , . . .; . .". , . . ., . (!"# «$%"»)

#8 #% $"$# > $& #/ % # # 8$*@ / $8 #" = 8 & " A C % #"#8 $8 * ! % > $ -PRAM (Phase-changeRandomAccessMemory). ' " 8 # & # / ?& " # / $8 # #"$&*% " &* C # " #- # Ge2Sb2Te5(GST225) [1]. %8 # / ?& " # / # & " " = " >8 "$8 & C## #%C & # $8 # "#& % #"#- 8 " # C A "$& # > #" # # " # $#? ,# > " /" & 8.

' " = / ? ""8 # @ " $# 8 *E # %8 - # / ?& " #: " % # " $8 =*@ & # # >8 $8 $ $& #% & , " / # #/ A& , # $"& @=# %$&- # A # $ GST ( #". 1, ). # 8 $ # C& ?# & # 8 ?# *" 8 & C %8 $ ( # 8 8 50 8, >- " — 70 8). ' A 8 "& $"" $C 88# # #%8 # ! %> $#" # " 8 ?H 8 / #, & $>"# * - " * %$#"# # ! 8 ##.

8 *E # # / ?& " # %8 $# % ## - " ## " « " >8» & 8 ( #". 1, ). ' 8 # $& 8 ! C GS % ! 8# " #" & " #/ $=#/ &. ' $"" $C 88# # $#" # 8 !#% # 8 & / ?& " # " ## & , $#8> @= 8 # 8 -# .

. 1. ) + % & * $:

— " $8 =*@ «$»; — " " >8 & 8

0 +

1. Yamada N., Ohno E., Nishiuchi K., Akahira N., Takao M. // J. Appl. Phys.,

69(5), 2849 (1991).

251

. . 9 , $. . , ". . $= ; '; . .$. 4 , . . ., . (!"# «$%"»)

# " # % /" # "& 8 &> % ( 10 ppm) # $& # ">- = # % #"#8 " # "#& >" / " # &* " # " " . &- C# & # ?&@ & "* # & " # #%$ $#& C # A #& C "$# .

252